Title:
Semiconductor devices and their manufacturing methods
Document Type and Number:
Japanese Patent JP6327139
Kind Code:
B2
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Inventors:
Toru Oka
Kazuya Hasegawa
Shigeaki Tanaka
Murakami Rinsho
Ueno Yukihisa
Kazuya Hasegawa
Shigeaki Tanaka
Murakami Rinsho
Ueno Yukihisa
Application Number:
JP2014248848A
Publication Date:
May 23, 2018
Filing Date:
December 09, 2014
Export Citation:
Assignee:
Toyoda Gosei Co., Ltd.
International Classes:
H01L29/872; H01L21/316; H01L21/329; H01L21/336; H01L21/338; H01L29/06; H01L29/12; H01L29/41; H01L29/417; H01L29/47; H01L29/778; H01L29/78; H01L29/786; H01L29/812; H01L29/861; H01L29/868
Domestic Patent References:
JP2009111204A | ||||
JP2014229879A | ||||
JP2012038906A | ||||
JP2011071247A |
Foreign References:
WO2013080769A1 |
Attorney, Agent or Firm:
Meisei International Patent Office