PURPOSE: To improve the reliability of connecting with an external circuit without damaging the electrodes of a semiconductor element by connecting the terminal of a characteristic measuring unit of the element through a conductive contactor elastically deformable in a perpendicular direction to the surface of a substrate with the electrodes.

CONSTITUTION: A conductive contactor 7 is provided on a plastic film 6. A semiconductor chip 1 is moved in case of measuring to position aluminum electrodes 2 to be measured directly under the cushionable contactor 7, a probe 4 disposed directly above the contactor 7 is pushed to the upper surface of the contactor 7, and the contactor 7 is contacted with the electrodes 2. Since a plastic film 6 has an elasticity, it can be measured only when the probe 4 is pressed. Since the contactor 7 is contacted planely with the electrodes 2, the electrodes 2 are not damaged.