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Title:
SEMICONDUCTOR ELEMENT
Document Type and Number:
Japanese Patent JPS6197852
Kind Code:
A
Abstract:

PURPOSE: To contrive to improve the mass productivity and reliability by preventing the propagation of cracks generating in bonding pads during the growth of insulation films by CVD by a method wherein a band conductor layer not contributed to wring is provided in proximity to the whole or part of the periphery of a pad.

CONSTITUTION: The conductor layer including a bonding pad 1 is formed out of Al or Al alloy, and its periphery is almost all surrounded by a band conductor layer 6. The band conductor layer is e.g. 5W20μm wide and is provided at an interval of 10W30μm from the bonding pad. Cracks 3 of an insulation film which generate in the periphery of the bonding pad during the growth of insulation film stop at the inner periphery of this band conductor layer but do not propagate outside. Providing this layer in the form of branching from the wiring part extending out of the bonding pad produces the same effect. Besides, if this laser is provided in the form of surrounding only the side situated inside the bonding pad on the element, the propagation of cracks of insulation film to the principle circuit part can be prevented.


Inventors:
OKAMOTO TOMIO
Application Number:
JP22001484A
Publication Date:
May 16, 1986
Filing Date:
October 18, 1984
Export Citation:
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Assignee:
MATSUSHITA ELECTRONICS CORP
International Classes:
H01L21/60; H01L23/485; (IPC1-7): H01L23/48
Attorney, Agent or Firm:
Akira Kobiji (2 outside)



 
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