Title:
SEMICONDUCTOR EVALUATION DEVICE, MAGNETIC FIELD DETECTOR USED FOR IT, ITS PRODUCTION AND MEMORY MEDIUM HAVING STORED PROGRAM FOR SEMICONDUCTOR EVALUATION THEREON
Document Type and Number:
Japanese Patent JP3189801
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To exactly measure the radiation noise of a semiconductor.
SOLUTION: This device is provided with an electromagnetic measuring mean 1 measuring two dimensional electromagnetic field distribution in a plane parallel to the upper surface of a semiconductor, a distribution image production means 2 extracting an electromagnetic field distribution larger than a predetermined threshold from the electromagnetic field distribution of the semiconductor measured by this electromagnetic field measuring means 1 and converting the electromagnetic field distribution to the distribution image of the two dimensional plane, an image comparison means 3 the distribution image produced by the distribution image production means 2 and projection images of wiring and lead frame of preproduced semiconductor and a radiation source specifying means 4 specifying the overlapped wiring or the lead frame in the case when the images of the electromagnetic field distribution and the wiring and the lead frame overlap by the comparison by the image comparison means 3.
Inventors:
Naoya Tamaki
Norio Masuda
Norio Masuda
Application Number:
JP24291698A
Publication Date:
July 16, 2001
Filing Date:
August 28, 1998
Export Citation:
Assignee:
NEC
International Classes:
G01R33/02; G01R29/08; G01R31/26; G01R31/302; G01R31/315; (IPC1-7): G01R31/26; G01R29/08; G01R31/302; G01R33/02
Domestic Patent References:
| JP1038984A |
Attorney, Agent or Firm:
Isamu Takahashi