Title:
SEMICONDUCTOR FACTORY
Document Type and Number:
Japanese Patent JP3884188
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To eliminate the need for the sealing works of a duct penetrating section, and to easily conduct the connection of a duct and the mounting and demounting of a ceiling material.
SOLUTION: The semiconductor factory 1 has a main production-zone clean room 10 in which a production device 11 is installed, a ceiling-side space formed to the upper section of the main production-zone clean room 10, a ceiling material 17 partitioning the ceiling-side space 25 and the main production-zone clean room 10, fans mounted in the ceiling-side space 25, a duct being arranged in the ceiling-side space 25 and supplying treated air, and a branch duct 12 for supplying the production device 11 with air. The ceiling-side space 25 is brought to negative pressure by the main production-zone clean room 10, and the branch duct 12 is penetrated to the ceiling material.
Inventors:
Jiro Kakizaki
Kazuto Taniguchi
Kazuto Taniguchi
Application Number:
JP18069799A
Publication Date:
February 21, 2007
Filing Date:
June 25, 1999
Export Citation:
Assignee:
TAKENAKA CORPORATION
International Classes:
E04B9/00; E04H5/02; F24F7/06; (IPC1-7): E04H5/02; E04B9/00; F24F7/06
Domestic Patent References:
| JP3051647A | ||||
| JP9101051A | ||||
| JP2229347A |
Attorney, Agent or Firm:
Furuya Fumio
Eisuke Suzuki
Eisuke Suzuki