Title:
半導体工場
Document Type and Number:
Japanese Patent JP4057739
Kind Code:
B2
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Inventors:
Jiro Kakizaki
Fumio Watanabe
Toru Kobayashi
Hideki Wakabayashi
Fumio Watanabe
Toru Kobayashi
Hideki Wakabayashi
Application Number:
JP11676399A
Publication Date:
March 05, 2008
Filing Date:
April 23, 1999
Export Citation:
Assignee:
TAKENAKA CORPORATION
International Classes:
B01D46/00; H01L21/02; E04H5/02; F24F7/06
Domestic Patent References:
| JP4113141A | ||||
| JP7263172A | ||||
| JP10054585A | ||||
| JP10096333A |
Attorney, Agent or Firm:
Furuya Fumio
Eisuke Suzuki
Eisuke Suzuki