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Title:
半導体用フィルム、半導体装置の製造方法および半導体装置
Document Type and Number:
Japanese Patent JP5417729
Kind Code:
B2
Abstract:

To provide a film for a semiconductor which does not require a flux cleansing process, offers superior productivity, and improves workability in processing a semiconductor wafer.

The film for the semiconductor is the laminated film consisting of a back grind tape and an adhesive layer. The adhesive layer is made of a resin composition containing a resin capable of bridging and a compound having flux activity. A method for manufacturing a semiconductor device includes: a step for bonding the adhesive layer of the film for the semiconductor to a functional surface of a semiconductor wafer having preformed solder bumps; a step for grinding the surface opposite to the functional surface; a step for dividing the semiconductor wafer into individual pieces to obtain a semiconductor element; and a step for peeling the semiconductor element between the back grind tape and the adhesive layer of the film for the semiconductor and picking the semiconductor element to mount it on a substrate.

COPYRIGHT: (C)2010,JPO&INPIT


Inventors:
Takashi Hirano
Application Number:
JP2008085439A
Publication Date:
February 19, 2014
Filing Date:
March 28, 2008
Export Citation:
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Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
H01L21/301; C09J7/02; C09J11/06; C09J201/00; H01L21/304; H01L21/60
Domestic Patent References:
JP2006245242A
JP2001332520A
JP2007157820A
JP2001181563A
JP2005191322A
JP7006982A
JP2007116079A
Foreign References:
WO1997021243A1
WO2007125650A1



 
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