Title:
SEMICONDUCTOR INSPECTION DEVICE
Document Type and Number:
Japanese Patent JP2002131369
Kind Code:
A
Abstract:
To provide a semiconductor inspection device capable of shortening the waiting time from voltage impression to measurement when a voltage impression current is measured for inspecting a DC characteristic.
For shortening the waiting time from voltage impression to the measurement of a current, a function of detecting a current converging state is provided in a DC measurement unit, and consequently, a minimum test time in the machine number by means of the same kind of tester can be realized.
More Like This:
| WO/2000/016107 | METHOD FOR MANUFACTURING SUBSTRATE FOR INSPECTING SEMICONDUCTOR DEVICE |
| JPS584081 | 【考案の名称】半導体素子試験装置 |
Inventors:
ISHII TOSHIICHI
Application Number:
JP2000321323A
Publication Date:
May 09, 2002
Filing Date:
October 20, 2000
Export Citation:
Assignee:
SEIKO INSTR INC
International Classes:
G01R31/26; (IPC1-7): G01R31/26
Attorney, Agent or Firm:
Masaaki Sakagami
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