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Title:
SEMICONDUCTOR INTEGRATED CIRCUIT DESIGNING DEVICE AND SEMICONDUCTOR INTEGRATED CIRCUIT DESIGNING METHOD
Document Type and Number:
Japanese Patent JP2010212377
Kind Code:
A
Abstract:

To provide a semiconductor integrated circuit designing device and method which suppresses film thickness fluctuations in metal wiring of a signal having a strict timing margin.

In the semiconductor integrated circuit designing device 1, a designated signal metal pattern extracting part 11 extracts a metal pattern of a designated signal name from layout data stored in a memory device 1000, a metal pattern surrounding area setting part 12 sets a predetermined area surrounding the metal pattern extracted by the designated signal metal pattern extracting part 11, a metal coverage factor evaluating part 13 computes a metal coverage factor of the surrounding area set by the metal pattern surrounding area setting part 12, and determines whether the metal coverage factor is equal to or more than a given value, and when it is determined that the metal coverage factor is less than the given value, a dummy metal inserting part 14 inserts a dummy metal into the surrounding area.


Inventors:
KITAOKA MIYAKO
KIMURA KAZUNARI
Application Number:
JP2009055539A
Publication Date:
September 24, 2010
Filing Date:
March 09, 2009
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
H01L21/82; G06F17/50; H01L21/3205; H01L21/822; H01L23/52; H01L27/04
Attorney, Agent or Firm:
Hiroshi Horiguchi