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Title:
SEMICONDUCTOR LASER ELEMENT
Document Type and Number:
Japanese Patent JP2002305352
Kind Code:
A
Abstract:

To improve reliability with high output oscillation in a semiconductor layer element.

An n-GaAs buffer layer 2, an n-In0.48Ga0.52P lower clad layer 3, an n or i-Inx1Ga1-x1As1-y1Py1 optical waveguide layer 4, an i-GaAs1-y2Py2 tension distortion barrier layer 5, a compression distortion Inx3Ga1-x3As1-y3Py3 quantum well active layer 6, an i-GaAs1-y2Py2 tension distortion barrier layer 7, a p or i-Inx1Ga1-x1As1-y1Py1 upper optical waveguide layer 8, a p-In0.48Ga0.52P first upper clad layer 9, a GaAs etching stop layer 10, a p-In0.48Ga0.52P second upper clad layer 11 and a p-GaAs contact layer 12 are grown on the (100) face of an n-GaAs substrate 1. Two ridge grooves are formed and the p-GaAs contact layer in a part for 30 μm from a resonator end face cleavage position to an element inner direction on the upper face of the ridge part between the two ridge grooves is removed, and a current non-injection area is formed.


Inventors:
KUNIYASU TOSHIAKI
FUKUNAGA TOSHIAKI
Application Number:
JP2001106833A
Publication Date:
October 18, 2002
Filing Date:
April 05, 2001
Export Citation:
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Assignee:
FUJI PHOTO FILM CO LTD
International Classes:
H01S5/16; H01S5/223; H01S5/34; H01S5/343; (IPC1-7): H01S5/16; H01S5/223
Attorney, Agent or Firm:
Seiji Yanagida (1 person outside)