To provide a semiconductor light-emitting element array in which uniform modulation characteristic can be obtained at each light-emitting part, while preventing degraded responsivity and enlargement in size.
In a VCSEL array 1 according to the present invention, uniform modulation characteristics can be obtained at respective VCSEL elements 2A to 2R because electric resistance and floating capacitance can be equalized at the same time to allow CR time constants to be almost the same. The electric resistance is equalized by changing width of lines 8A to 8R. The floating capacitance is equalized by forming proton implantation areas 18A, 18D to 18N, 18R. Degradation of responsivity can be prevented because CR time constants can be controlled not to increase. The VCSEL array 1 does not need any additional external parts for changing the width of lines 8A to 8R and forming the proton implantation areas 18A, 18D to 18N, 18R in a light-emitting layer 4, so that the VCSEL array 1 can be also prevented from being enlarged.
Shiro Terasaki
Satoru Ishida
Kenichi Shibayama
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