Title:
SEMICONDUCTOR MANUFACTURING APPARATUS
Document Type and Number:
Japanese Patent JPS63105409
Kind Code:
A
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Inventors:
IWAMOTO KOICHI
Application Number:
JP24905586A
Publication Date:
May 10, 1988
Filing Date:
October 20, 1986
Export Citation:
Assignee:
SEIKO EPSON CORP
International Classes:
H01L21/3205; H01B13/00; (IPC1-7): H01B13/00; H01L21/88
Domestic Patent References:
| JPS61214306A | 1986-09-24 |
Attorney, Agent or Firm:
Mogami (2 outside)