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Title:
SEMICONDUCTOR MANUFACTURING DEVICE AND MANUFACTURE FOR SEMICONDUCTOR DEVICE USING IT
Document Type and Number:
Japanese Patent JPH03120129
Kind Code:
A
Abstract:

PURPOSE: To perform stable conveyance even without hanging down a lead frame by moving a magazine to the upper or lower by a vertically moving mechanism simultaneously with the lead frame, received in the magazine, successively taken out and supplied to the outside by driving a conveying belt, when the lead frame is requested next.

CONSTITUTION: By a signal of detecting a lead frame 4 by a frame detector 2d, a driving motor of a belt drive mechanism 2 is stopped, next by rotating a motor 3f for driving a vertically moving mechanism 3 in a direction of lifting a magazine 1, a vertically moving shaft screw 3d is rotated. Next by a one-turn detecting mechanism 3e, the vertically moving shaft screw 3d is confirmed to make one turn with the driving motor 3f stopped. Now simultaneously the frame detector 2d is confirmed to be made off. By the above action, the lead frame 4, fed from an external conveying means, is received into the magazine 1 with preparations made for the next lead frame 4 in a condition that a side plate groove is lifted by one step.


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Inventors:
ISHIZUKA MITSUHIRO
EGASHIRA TOSHIYUKI
Application Number:
JP25926989A
Publication Date:
May 22, 1991
Filing Date:
October 03, 1989
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
International Classes:
B65H1/28; B65G1/00; B65G1/07; B65H3/04; B65H5/02; B65H29/18; (IPC1-7): B65H1/28; B65H3/04; B65H5/02; B65H29/18
Attorney, Agent or Firm:
Masuo Oiwa (2 outside)