Title:
半導体製造装置
Document Type and Number:
Japanese Patent JP6422907
Kind Code:
B2
Inventors:
Shinya Sato
Application Number:
JP2016050181A
Publication Date:
November 14, 2018
Filing Date:
March 14, 2016
Export Citation:
Assignee:
Toshiba Corporation
Toshiba Electronic Devices & Storage Corporation
Toshiba Electronic Devices & Storage Corporation
International Classes:
H01L21/205; C23C16/44; H01L21/3065; H01L21/31
Domestic Patent References:
| JP2001107243A | ||||
| JP2012054541A | ||||
| JP2003077839A | ||||
| JP2010287361A |
Attorney, Agent or Firm:
Hiroyuki Nagai
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira
Yukitaka Nakamura
Yasukazu Sato
Satoru Asakura
Takeshi Sekine
Akaoka Akira