PURPOSE: To obtain semiconductor manufacturing equipment capable of repairing a semiconductor manufacturing equipment without deteriorating the degree of cleanliness of a clean room.

CONSTITUTION: A clean room 2 kept at a positive pressure, and a maintenance chamber 3 which is isolated from the clean room 2 via a barrier 5 having an aperture 6, and kept a negative pressure to the clean room 2 are installed. A semiconductor manufacturing equipment 4 is installed so as to be freely movable in the maintenance chamber 3. The semiconductor manufacturing equipment 4 is equipped with a cabinet 18 having an operation port on one end side. Machines necessary for manufacturing semiconductor devices are installed in the cabinet 18. The aperture 6 of the barrier 5 can be opened and closed by using a rolling-up type curtain 13. The one end side of the cabinet 18 is connected with the aperture 6, and the operation port is made to face the aperture 6. Thereby the machines in the cabinet 18 are operated via the aperture 6 and the operation port from the clean room 2 side, so that semiconductor devices can be manufactured under clean surroundings.