To provide a semiconductor manufacturing system rapidly comprehending trouble in an apparatus and conveyance.
The semiconductor manufacturing system 70 includes: a host computer 1; a CR layout storage apparatus 2; an overall production information system 3; an apparatus control system 4; a conveyance control system 5; a yield management system 6; a semiconductor manufacturing apparatus 7a; a semiconductor manufacturing apparatus 7n; a LAN 8; an apparatus information acquisition section 11; a conveyance information acquisition section 12; a production information acquisition section 13; an interlocking display control section 14; an interlocking display section 15; and a conveyance instruction section 16. The interlocking display control section 14, the interlocking display section 15 and the conveyance instruction section 16 rapidly comprehend trouble in the apparatus and conveyance in an automated clean room for semiconductor manufacturing and display the trouble on a clean room layout screen. After the display, a conveyance vehicle is specified on the clean room layout screen, and a transfer path of the conveyance vehicle and a semiconductor apparatus as a transfer destination are changed.
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