Title:
SEMICONDUCTOR MANUFACTURING SYSTEM
Document Type and Number:
Japanese Patent JP3398419
Kind Code:
B2
Abstract:
PURPOSE: To provide a semiconductor manufacturing system which can surely prevent the pollution of semiconductor components by dust, and besides can enable the cut down of the amount of investment on facilities and running cost.
CONSTITUTION: This system is equipped with a clean tunnel 10 for carrying a plurality of semiconductor components into a plurality of semiconductor manufacture devices, a component shifter 11 for delivering the semiconductor components between the said clean room 10 and each semiconductor manufacture device, and a variable-volume clean booth 12 for performing specified maintenance work to this clean tunnel 10, each of the semiconductor manufacture device, or the component shifter 11.
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Inventors:
Yoshiyuki Kaneda
Akira Kojima
Takayuki Fukunaga
Toshiro Kizakihara
Akira Kojima
Takayuki Fukunaga
Toshiro Kizakihara
Application Number:
JP15300393A
Publication Date:
April 21, 2003
Filing Date:
May 31, 1993
Export Citation:
Assignee:
ソニー株式会社
International Classes:
B65G49/00; F24F7/06; H01L21/677; H01L21/68; (IPC1-7): H01L21/68; B65G49/00; F24F7/06
Domestic Patent References:
| JP3158320A | ||||
| JP4137613A | ||||
| JP5106887A | ||||
| JP367839U | ||||
| JP63196031U |
Attorney, Agent or Firm:
Kuninori Funabashi
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