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Title:
SEMICONDUCTOR MEMORY AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JPH06291276
Kind Code:
A
Abstract:

PURPOSE: To enable high integration by enlarging the capacity of a memory cell for a plane area of the memory cell.

CONSTITUTION: A lower electrode 25 of a capacitor 28 and a conductive thin film 13 which is a shield electrode for element isolation in a field region 16 are partially opposed each other through a dielectric film 31 and the dielectric film 31 works as a capacitor dielectric film of the capacitor 28. Therefore, in the lower electrode 25, signal charge is stored not only in a surface in opposition to an upper electrode 27 through a capacitor dielectric film 26 but also in a surface in opposition to the conductive thin film 13 through the dielectric film 31.


Inventors:
WADA TOSHIO
ANZAI KENJI
Application Number:
JP10030193A
Publication Date:
October 18, 1994
Filing Date:
April 02, 1993
Export Citation:
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Assignee:
NIPPON STEEL CORP
International Classes:
H01L27/04; H01L21/822; H01L21/8242; H01L27/10; H01L27/108; (IPC1-7): H01L27/108; H01L27/04
Attorney, Agent or Firm:
Kokubun Takaetsu



 
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