To provide a semiconductor microactuator capable of forcibly returning a displaced movable element to an original position.
This semiconductor microactuator is provided with a semiconductor board 1, the movable element 2 displaced by an external factor, a first bendable part 31 for connecting the semiconductor board 1 to the movable element 2 and bending in accordance with the change of temperature to displace the movable element 2 to a vertical direction with respect to a surface of the semiconductor board 1, and a second bendable part 32 for connecting the semiconductor board 1 and the movable element 2 and bending in accordance with the change of the temperature to displace the movable element 2 to an opposite direction of the first bendable part 31.
Tomonari, Shigeaki
Kawada, Hiroshi
Yoshida, Hitoshi
Saito, Kimiaki
Kamakura, Shiyouyu
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