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Title:
SEMICONDUCTOR MICROACTUATOR
Document Type and Number:
Japanese Patent JP2002166400
Kind Code:
A
Abstract:

To provide a semiconductor microactuator capable of forcibly returning a displaced movable element to an original position.

This semiconductor microactuator is provided with a semiconductor board 1, the movable element 2 displaced by an external factor, a first bendable part 31 for connecting the semiconductor board 1 to the movable element 2 and bending in accordance with the change of temperature to displace the movable element 2 to a vertical direction with respect to a surface of the semiconductor board 1, and a second bendable part 32 for connecting the semiconductor board 1 and the movable element 2 and bending in accordance with the change of the temperature to displace the movable element 2 to an opposite direction of the first bendable part 31.


Inventors:
Yoshida, Kazuji
Tomonari, Shigeaki
Kawada, Hiroshi
Yoshida, Hitoshi
Saito, Kimiaki
Kamakura, Shiyouyu
Application Number:
JP2000000363646
Publication Date:
June 11, 2002
Filing Date:
November 29, 2000
Export Citation:
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Assignee:
MATSUSHITA ELECTRIC WORKS LTD
International Classes:
B81B3/00; F03G7/06; H01H37/32; H01H61/00; B81B3/00; F03G7/06; H01H37/00; H01H61/00; (IPC1-7): B81B3/00; F03G7/06; H01H37/32; H01H61/00