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Patent Searching and Data


Title:
SEMICONDUCTOR PRESSURE SENSOR AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
Japanese Patent JP2001116639
Kind Code:
A
Abstract:

To prevent penetration of air and moisture into a resin case and bubble generation inside a coating resin layer to improve operating environment resistance and reliability.

In this semiconductor sensor, a pressure-sensitive sensor chip 1 formed with a semiconductor distortion gauge is installed inside the resin case 3 insert-molded with lead terminals 4, the lead terminals 4 are connected to the sensor chip 1 with bonding wires 5, and a soft gelatinous coating resin 6 is filled in the resin case 3 to seal around the sensor chip 1 and the bonding wires 5. Case penetration areas of the lead terminals 4 including bonded parts between the lead terminals 4 and the bonding wires 5 are coated with a sealing resin 8 of an adhesive or a gel having a relatively high hardness, and the soft gelatinous coating resin 6 having waterproofness and chemical resistance is filled in the residual area of the resin case 3 to coat the pressure-sensitive sensor chip 1 and the bonding wires 5.


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Inventors:
SAITO KAZUNORI
Application Number:
JP30088699A
Publication Date:
April 27, 2001
Filing Date:
October 22, 1999
Export Citation:
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Assignee:
FUJI ELECTRIC CO LTD
International Classes:
G01L9/04; G01L9/00; H01L29/84; (IPC1-7): G01L9/04; H01L29/84
Attorney, Agent or Firm:
Shoji Shinobe