PURPOSE: To enable a single kind of sensor chip to deal with different pressures to measure by a method wherein gauge resistors which form at least two sets of Wheastone bridge circuits are arranged on the surface of the pressure sensing diaphragm of a sensor chip.
CONSTITUTION: First resistors R11-R14 which form a first Wheastone bridge circuit and second resistors R21-R24 which constitute a second Wheastone bridge circuit are disposed on the surface of the pressure sensing diaphragm SD of a sensor chip SC. The first resistors R11-R14 are connected to first bonding pads BP11-BP14 through the intermediary of first wires WR11-WR14 respectively, and the second resistors R21-R24 are connected to first bonding pads BP21-BP24 through the intermediary of first wires WR21-WR24. respectively.
