PURPOSE: To stably detect pressure of a corrosive and high temperature pressure measuring object medium by filling a pressure transmitting flow medium in an airtight space surrounded by a case, and slidably installing a pressure transmitting part in a pressure introducing port to be measured.
CONSTITUTION: A detecting element part 10 is formed by joining a silicon substrate 1 having a diaphragm part 11 deformed by pressure to be measured and an insulating board 2 where an electrode part 31 is formed on a surface opposed to the diaphragm part 11 by electrostatic coupling. The whole element part 10 is adhered to a lower inner wall surface of a lower side case 5 by an adhesive 90, and the upper and lower cases 4 and 5 are joined together by ultrasonic welding or the like, and a pressure transmitting medium 7 is filled in an airtight space 70. A pressure transmitting slidingly movable member 6 is installed in a pressure introducing port 41 of the case 4, and prevents the medium 7 from leaking to a measuring object side medium 12. Pressure of the medium 12 applies pressure to a member 6, and this pressure is transmitted to the medium 7, and the diaphragm 11 of the substrate 1 of the element 10 is deformed by this pressure, and capacitance of the element 10 is changed.