Title:
半導体圧力センサ
Document Type and Number:
Japanese Patent JP3596935
Kind Code:
B2
Inventors:
Hiroshi Nagasaka
Takeo Yokota
Kano Ichi
Takeo Yokota
Kano Ichi
Application Number:
JP9846095A
Publication Date:
December 02, 2004
Filing Date:
April 24, 1995
Export Citation:
Assignee:
Nagano Keiki Co., Ltd.
International Classes:
G01P15/12; G01L9/00; G01L9/04; H01L29/84; (IPC1-7): H01L29/84; G01L9/04; G01P15/12
Domestic Patent References:
| JP4162779A | ||||
| JP2039574A | ||||
| JP5226675A |
Attorney, Agent or Firm:
Yasuo Ishikawa