Title:
SEMICONDUCTOR PRESSURE SENSOR
Document Type and Number:
Japanese Patent JPH095197
Kind Code:
A
Abstract:
PURPOSE: To reduce noise due to external influence such as temperature change and make it possible to use a semiconductor pressure sensor also for an organic solvent gas.
CONSTITUTION: A sensor element 20 of a semiconductor and a pressure introducing cylinder 25 for introducing a pressure to be measured are joined airtightly. A plurality of spacers 30 including a spherical silicon, ceramic, or silica powder in nearly equal diameter are pinched in one layer between the sensor element 20 and the pressure introducing cylinder 25, and fluoro-silicone resin 32 is filled in the gap for connection.
Inventors:
FUKUHISA KOJI
NAKAMIZO YOSHIYUKI
NAKAMIZO YOSHIYUKI
Application Number:
JP17435495A
Publication Date:
January 10, 1997
Filing Date:
June 15, 1995
Export Citation:
Assignee:
HOKURIKU ELECT IND
International Classes:
G01L9/04; G01L9/00; G01L19/00; G01L19/04; (IPC1-7): G01L19/00; G01L9/04; G01L19/04
Attorney, Agent or Firm:
Hirosawa Isao
Next Patent: COLD CATHODE GAUGE