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Title:
SEMICONDUCTOR PRESSURE TRANSDUCER
Document Type and Number:
Japanese Patent JP59176639
Kind Code:
A
Abstract:

PURPOSE: To reduce the manufacture cost by using borosilicate glass which has a ≤500°C glass transition temperature and a specific mean coefficient of thermal expansion up to its sticking temperature as a base where a sensitive pellet is supported fixedly.

CONSTITUTION: A semiconductor pressure transducer has a thin diaphragm surface 2 which senses pressure in the center of a semiconductor crystal plate 1 mode of, for example, silicon, and a diffused resistance layer 3 of the conduction type opposite to the substrate 1 is formed on one side of the diaphragm surface and used as a strain inducing resistance gauge. Then, borosilicate glass which has a ≤500°C glass transition temperature and a (32W36)×10-7/°C means coefficient of thermal expansion up to its sticking temperature is used for the base 6 which supports the sensitive pellet constituted as above. Consequently, electrodes of said sensitive pellet is wired by aluminum and the manufacture is facilitated and reduced in cost.


Inventors:
Shinpo, Masaru
Fukuda, Kiyoshi
Shiromizu, Shunji
Application Number:
JP1983000051977
Publication Date:
October 06, 1984
Filing Date:
March 28, 1983
Export Citation:
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Assignee:
TOSHIBA CORP
International Classes:
G01L9/04; C03C3/00; C03C3/089; C03C3/091; G01L9/00; (IPC1-7): C03C3/08; C03C3/10; C03C3/30; G01L9/04



 
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