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Patent Searching and Data


Title:
SEMICONDUCTOR RESIN SEALING DEVICE
Document Type and Number:
Japanese Patent JP2003224156
Kind Code:
A
Abstract:

To provide a semiconductor resin sealing device which has a clamping force of high accuracy and/or controls a position of a metal mold with high accuracy.

A device 2 comprises a pair of metal molds for sealing a semiconductor chip with resin by placing the semiconductor chip in a cavity and injecting the resin into the cavity while clamping, a servo motor 20 that drives the clamping/opening operation of the metal mold, a controller 18 that controls a motor, an encoder 24 that detects the rotation angle of the motor, and a load cell 16 that detects the clamping force of the metal mold. The controller compares/calculates a detected value of the load cell and a target clamping force during the clamping operation, and then controls the motor based on the result of the calculation, and then, in a region for an operation other then the clamping operation, controls the motor based on a detected value of the encoder. While die-opening, the position of the metal mold is controlled while the semiconductor chip, etc., is taken in/out of a region between a pair of metal molds. A relative position of the metal mold for the position of a transport mechanism is specified with a high degree of accuracy, so that taking in/out is surely performed.


Inventors:
MATSUO MITSUTAKA
OKU KOJI
Application Number:
JP2002018642A
Publication Date:
August 08, 2003
Filing Date:
January 28, 2002
Export Citation:
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Assignee:
MITSUBISHI ELECTRIC CORP
MITSUBISHI ELECTRIC ENG
International Classes:
B29C45/02; B29C45/76; H01L21/56; (IPC1-7): H01L21/56; B29C45/02; B29C45/76
Attorney, Agent or Firm:
Aoyama Ryo (2 outside people)