Title:
SEMICONDUCTOR RESISTIVITY INSPECTION APPARATUS AND SEMICONDUCTOR RESISTIVITY INSPECTION METHOD
Document Type and Number:
Japanese Patent JP2015059858
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor resistivity inspection apparatus and a semiconductor resistivity inspection method capable of improving measuring accuracy or shortening measuring time.SOLUTION: According to an embodiment, provided is a semiconductor resistivity inspection apparatus including: a first chopper; a second chopper; an irradiation unit; a detector; a first lock-in amplifier; a second lock-in amplifier; and a computer. The first chopper chops infrared light emitted from a first light source and having a first wavelength that is a wavelength between a transverse optical phonon frequency and a longitudinal optical phonon frequency, with a first chopping frequency. The second chopper chops infrared light emitted from a second light source and having a second wavelength that is a wavelength different from the first wavelength, with a second chopping frequency. The computer evaluates a ratio of a resistivity of the infrared light at the first wavelength out of reflected light to a resistivity of the infrared light at the second wavelength out of the reflected light.
Inventors:
MAEKAWA YO
Application Number:
JP2013194311A
Publication Date:
March 30, 2015
Filing Date:
September 19, 2013
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
G01N21/3563; H01L21/66
Attorney, Agent or Firm:
Masahiko Hiugaji