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Title:
SEMICONDUCTOR SENSOR DEVICE
Document Type and Number:
Japanese Patent JP2009063551
Kind Code:
A
Abstract:

To provide a semiconductor sensor device which can suppress the degradation of reliability even when it forms a resin sealed package configuration in order to simplify manufacturing processes.

A frame body part 11, a weight part 12 arranged inside the frame body part 11, and a flexible part 13 swingably supporting the weight part 12 on the frame body part 11 are included. A sensor element 10 detecting a physical quantity according to the displacement amount of the weight part 12, a lead frame 1 fixing the sensor element 10 on its top surface, and at least a sealing resin layer 30 sealing the sensor element 10 are provided. A recessed part 2 having a predetermined depth in the thickness direction from the top surface is formed in at least a region of the lead frame 1 corresponding to the region inside the frame body part 11.


Inventors:
TANAKA JUNYA
Application Number:
JP2007234090A
Publication Date:
March 26, 2009
Filing Date:
September 10, 2007
Export Citation:
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Assignee:
ROHM CO LTD
International Classes:
G01P15/08; G01P15/12; G01P15/18; H01L25/16
Domestic Patent References:
JPH08320332A1996-12-03
JP2005140720A2005-06-02
JP2003136494A2003-05-14
JP2006179607A2006-07-06
JP2001183389A2001-07-06
JPH09213840A1997-08-15
JPH05215767A1993-08-24
JP2004135193A2004-04-30
JP2006060564A2006-03-02
JP2007048994A2007-02-22
JP2004209585A2004-07-29
JP2001227902A2001-08-24
JP2004525357A2004-08-19
JP2006156674A2006-06-15
JP2005327880A2005-11-24
JP2005169541A2005-06-30
JPH0854413A1996-02-27
JP2001235485A2001-08-31
JP2006179607A2006-07-06
Attorney, Agent or Firm:
Shizuo Sano
Hideki Hayashida