Title:
SEMICONDUCTOR SENSOR
Document Type and Number:
Japanese Patent JP3722191
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To provide a semiconductor sensor capable of detecting high pressure.
SOLUTION: A semiconductor pressure sensor is provided with a pressure introducing opening 2 for introducing the pressure of a medium to be measured at a pressure introducing member 3, is provided with a semiconductor and a base plate 6 directly or indirectly provided with the semiconductor, and receives the pressure of the medium to be measured introduced from the pressure introducing opening 2 to detect the pressure of the medium to be measured by the semiconductor. As the base plate 6 is airtightly connected to the pressure introducing member 3 so that the semiconductor may face the pressure introducing opening 2, it is possible to detect the high pressure of the medium to be measured.
Inventors:
Koide, Shigeki
Application Number:
JP1999000050977
Publication Date:
September 22, 2005
Filing Date:
February 26, 1999
Export Citation:
Assignee:
NIPPON SEIKI CO LTD
International Classes:
G01L9/04; G01L19/00; G01L19/14; G01L9/04; G01L19/00; (IPC1-7): G01L9/04; G01L19/00; G01L19/14
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