Title:
SEMICONDUCTOR SENSOR
Document Type and Number:
Japanese Patent JPH06302835
Kind Code:
A
Abstract:
PURPOSE: To develop a structure wherein a semiconductor sensor detecting an acceleration, a pressure or the like can be manufactured at good yield.
CONSTITUTION: A mass plate 19 is fixed and bonded to a semiconductor substrate 1 via a spacer, and a semiconductor resistance layer is formed in the semiconductor substrate in spacer fixing and bonding parts 15R, 15L. Thereby, a force acting on the mass plate is transmitted to the semiconductor substrate via the spacer, and the force is detected on the basis of a resistance value in the resistance layer. The sensor is manufactured at good yield by fixing the mass plate via the spacer, to the semiconductor substrate in which the semiconductor resistance layer has been formed.
Inventors:
SUZUKI YUJI
Application Number:
JP8858193A
Publication Date:
October 28, 1994
Filing Date:
April 15, 1993
Export Citation:
Assignee:
TOYOTA MOTOR CORP
International Classes:
G01L9/04; G01L9/00; G01P15/02; H01L29/84; (IPC1-7): H01L29/84; G01L9/04; G01P15/02
Attorney, Agent or Firm:
Hidehiko Okada (2 outside)