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Patent Searching and Data


Title:
SEMICONDUCTOR STORAGE DEVICE
Document Type and Number:
Japanese Patent JPH0240952
Kind Code:
A
Abstract:

PURPOSE: To take effective measures to cope with soft errors caused by α-rays by providing a capacitor between two storage nodes of an FF, and forming one electrode of the capacitor, of the same layer as a high resistance forming layer connected with the one node.

CONSTITUTION: On the surface of a P-well or P-type substrate 10, N+ diffusion layers 14 element-isolated by an oxide film 11 is formed; on the one diffusion layer 14, a gate polysilicon layer 15 is formed; a resistance polysilicon layer 16a and a polysilicon layer 15 which are formed via an interlayer insulating film 12 are connected via a contact hole 18; also on the other diffusion layer 14, a resistance polysilicon layer 16b is formed via an interlayer insulating layer 12; on the polysilicon layers 16a, 16b, a capacitor forming electrode 17 is formed via an interlayer film 13; the polysilicon layer 16a connected with the polysilicon layer 15 and the capacitor forming electrode 17 are connected via a contact hole 19. Thereby, the counter-measures to cope with soft errors caused by α-rays can be taken effectively.


Inventors:
FURUTA HIROSHI
Application Number:
JP19167888A
Publication Date:
February 09, 1990
Filing Date:
July 31, 1988
Export Citation:
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Assignee:
NEC CORP
International Classes:
G11C11/412; H01L21/822; H01L21/8244; H01L23/02; H01L27/04; H01L27/11; H03K3/356; (IPC1-7): G11C11/412; H01L23/02; H01L27/04; H01L27/11; H03K3/356
Attorney, Agent or Firm:
Masanori Fujimaki