Title:
SEMICONDUCTOR TYPE CURRENT METER
Document Type and Number:
Japanese Patent JPH03282217
Kind Code:
A
Abstract:
PURPOSE:To obtain an inexpensive flowmeter characterized by a compact configuration, light weight and easy handling by arranging a cantilever comprising a semiconductor substrate along the flowing direction of fluid to be measured so that a flow peeling body is set at the upstream. CONSTITUTION:A plurality of piezoelectric resistance elements 2 forming a bridge circuit are attached to one end of a cantilever 1 comprising a silicon substrate. A flow peeling body 3 is arranged in the vicinity of the resistance elements 2. The cantilever 1 is arranged at the bottom surface of a pipe 5 through a supporting body 4 along the flowing direction so that the body 3 is located at the upstream side of fluid to be measured (a). In this constitution, the cantilever 1 receives the force from the fluid. The piezoelectric resistance elements 2 detect the force and compute the flow speed of the fluid to be measured based on a specified computing expression. Therefore, an inexpensive flowmeter whose handling is very easy is obtained.
Inventors:
AGA TOSHIO
Application Number:
JP8247290A
Publication Date:
December 12, 1991
Filing Date:
March 29, 1990
Export Citation:
Assignee:
YOKOGAWA ELECTRIC CORP
International Classes:
G01F1/28; (IPC1-7): G01F1/28
Domestic Patent References:
| JPS629222A | 1987-01-17 | |||
| JPH0198926A | 1989-04-17 |
Attorney, Agent or Firm:
Hirofumi Higashino
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