SEMICONDUCTOR WAFER FLATNESS STATION

Title:

SEMICONDUCTOR WAFER FLATNESS STATION

Document Type and Number:

Japanese Patent JPS60170241

Kind Code:

A

Inventors:

ROBAATO SHII EIBU
NOERU ESU PODAJIYU
NEIRU EICHI JIYUDERU

Application Number:

JP895385A

Publication Date:

September 03, 1985

Filing Date:

January 21, 1985

Export Citation:

Assignee:

EI DEII II CORP

International Classes:

H01L21/66; H01L21/50; (IPC1-7): H01L21/50; H01L21/66

Attorney, Agent or Firm:

Kiyoshi Takahashi (1 person outside)

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