Title:
SEMICONDUCTOR WAFER
Document Type and Number:
Japanese Patent JPH0831705
Kind Code:
A
Abstract:
PURPOSE: To provide optimum semiconductor wafers capable of being easily discriminated positively at every manufacturing process.
CONSTITUTION: A wafer identification mark 2 containing the identification code of an optimum process is marked on a semiconductor wafer 1 being cut out from a semi-insulating GaAs single crystal and having a polished mirror surface. The wafer identification mark 2 has the following constitution. 0120-0250-I/I. 0120 represents a crystal lot number, 0250 a wafer number and I/I the identification code displaying the optimum process.
Inventors:
KASHIWA MIKIO
Application Number:
JP16085394A
Publication Date:
February 02, 1996
Filing Date:
July 13, 1994
Export Citation:
Assignee:
HITACHI CABLE
International Classes:
H01L23/00; H01L21/02; (IPC1-7): H01L21/02; H01L23/00
Attorney, Agent or Firm:
Takashi Matsumoto
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