Title:
SEMICONDUCTOR WITH CARRIER CAPACITY READING PART AND INTEGRATED DC VOLTAGE SUPPLY PART
Document Type and Number:
Japanese Patent JPH01220867
Kind Code:
A
Abstract:
PURPOSE: To form a detector in which capacitive coupling is possible even with complex structure by forming a reading electrode in a high concentration doping area of first or second conductivity, allowing an insulation coating to be stack on the area and further a conductive electrode layer on the coating, in addition, performing voltage introduction in the high concentration doping area of the reading electrode at high resistance with, at least, one electrode having the same conductivity as the reading electrode through a basic area of the detector. CONSTITUTION: A coupling capacitor (capacitor) is integrated in a detector. Supply of voltage is performed in DC current passing one electrode assigned near a reading electrode. If a bias voltage, for example, is applied between a voltage introduction electrode B and an opposite side C of the detector, a doped part of a reading electrode A is, naturally, set at an electric potential slightly different from the voltage introduction electrode. An electric potential difference is decided especially with an electrode interval and oxygen electric charge.
Inventors:
YOOZEFU KEMUMAA
GERUHARUTO RUTSUTSU
PEETERU HOORU
ROTAARU SHIYUTORIYUDERU
GERUHARUTO RUTSUTSU
PEETERU HOORU
ROTAARU SHIYUTORIYUDERU
Application Number:
JP11266588A
Publication Date:
September 04, 1989
Filing Date:
May 11, 1988
Export Citation:
Assignee:
MESSERSCHMITT BOELKOW BLOHM
GERUHARUTO RUTSUTSU
PEETERU HOORU
ROTAARU SHIYUTORIYUDERU
GERUHARUTO RUTSUTSU
PEETERU HOORU
ROTAARU SHIYUTORIYUDERU
International Classes:
H01L27/10; H01L21/8242; H01L27/108; H01L27/14; H01L27/146; H01L31/0248; H01L31/0352; H01L31/09; H01L31/10; H01L31/103; (IPC1-7): H01L27/10; H01L27/14; H01L31/00; H01L31/08
Attorney, Agent or Firm:
Mitsuyoshi Ezaki (1 person outside)