To manufacture at a low cost in a CMOS manufacturing process and perform electrical trimming with a few numbers of terminals in a sensing device for a semiconductor physical quantity.
The sensing device for the semiconductor physical quantity is provided with a Wheatstone bridge circuit 15 of a sensor element, an auxiliary memory circuit 12 that stores tentative trimming data, a main memory circuit 13 that stores fixed trimming data, and an adjusting circuit 14 that adjusts the output characteristics of the sensor element based on the trimming data stored in the auxiliary memory circuit 12 or the main memory circuit 13. These elements and circuits are composed of only an active element and a passive element that are manufactured by the CMOS manufacturing process and formed on the same semiconductor chip together with 7-8 pieces of terminals 21-28.
KAMIYANAGI KATSUMICHI
MORITA OSAMU
UEMATSU KATSUYUKI
| JPH0629555A | 1994-02-04 | |||
| JPH07262721A | 1995-10-13 | |||
| JPH0950325A | 1997-02-18 |