To improve the measuring precision of the physical property value of a fluid such as natural gas.
This sensor assembly includes a sensor unit 6 having a substrate 60, the insulator 65 arranged on the surface of the substrate 60 and the first resistor 61 provided on the insulator 65 and used for measuring the physical property value of the fluid coming into contact with the surface of the insulator 65 on the basis of the first drive power applied to the first resistor 61 and the temperature of the first resistor 61, the cover 7 provided to the sensor unit 6 so as to cover the insulator 65 while ensuring a space 72 permitting the fluid to flow along the surface of the insulator 65, and a second resistor 64 for controlling the temperature of at least one of the sensor unit 6 and the cover 7 corresponding to second drive power to be applied.
COPYRIGHT: (C)2011,JPO&INPIT
HAYASHI YASUE
MUTO HIROYUKI
KIYOTA MISAKO
MORIO SHUJI
JPH11174010A | 1999-07-02 | |||
JP2007248220A | 2007-09-27 | |||
JP2007248221A | 2007-09-27 | |||
JP2004037225A | 2004-02-05 |
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
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