Title:
センサ校正支援装置および方法
Document Type and Number:
Japanese Patent JP6767272
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To increase easiness of implementation of multiple point calibration of a temperature/humidity sensor fixed to a wall surface in a chamber and the like.SOLUTION: A sensor calibration support device 100a includes: a container 102 in which a humidity/temperature sensor 10 is stored in a space in the interior in a state that a wall surface provided with the temperature/humidity sensor 10 of a calibration object in the shape of a cylinder whose one end is open comes into contact with one end; a temperature and humidity generation unit 106 for generating a controlled temperature and humidity environment in the space inside the container 102; a temperature and humidity sensor 105 for measuring the temperature and the humidity in the space; a temperature and humidity control calculation unit 109 for controlling the temperature and humidity generation unit 106; a temperature sensor 113 for measuring the temperature and humidity in the vicinity of the temperature humidity sensor 10; and a sensor calibration support function unit 114 for calculating a theoretical dew point based on the controlled temperature and the controlled relative humidity measured by the temperature and humidity sensor 105 and calculating a relative humidity standard value in a position of the temperature sensor 113 based on the theoretical dew point and the temperature standard value measured by the temperatures sensor 113.SELECTED DRAWING: Figure 6
Inventors:
Masato Tanaka
Kohata Makoto
Toru Yamaguchi
Marie Mizushima
Sadaaki Ito
Satoshi Tateda
Hajime Shimizu
Kohata Makoto
Toru Yamaguchi
Marie Mizushima
Sadaaki Ito
Satoshi Tateda
Hajime Shimizu
Application Number:
JP2017013869A
Publication Date:
October 14, 2020
Filing Date:
January 30, 2017
Export Citation:
Assignee:
Azbil Co., Ltd.
International Classes:
G01N25/64; G01D18/00; G01K15/00; G01N27/00
Domestic Patent References:
| JP2016017889A | ||||
| JP2016003965A | ||||
| JP2004145846A | ||||
| JP9257283A |
Foreign References:
| CN105424767A | ||||
| CN202013206U |
Attorney, Agent or Firm:
Shigeki Yamakawa
Masaki Yamakawa
Masaki Yamakawa