Title:
SENSOR DEVICE
Document Type and Number:
Japanese Patent JP2009198337
Kind Code:
A
Abstract:
To provide a sensor device capable of preventing its destructive withstand pressure from lowering, while enhancing the sensitivity.
The sensor device 1 comprises a frame part 10, a movable part 20 and a carbon nanotube element 31 bridging across the frame part 10 and the movable part 20. Furthermore, the sensor device 1 comprises a corrugated part 40 which is made corrugated and connecting the frame part 10 to the movable part 20, and is configured to detect a physical quantity of an object to be detected by using the variation in the resistance value of the carbon nanotube element 31.
Inventors:
NAGAHAMA HIDEO
Application Number:
JP2008040747A
Publication Date:
September 03, 2009
Filing Date:
February 22, 2008
Export Citation:
Assignee:
PANASONIC ELEC WORKS CO LTD
International Classes:
G01L13/06; B82Y15/00; G01P15/12; G01P15/18; H01L29/84
Domestic Patent References:
JP2007139799A | 2007-06-07 | |||
JPH08159900A | 1996-06-21 | |||
JP2001267588A | 2001-09-28 | |||
JPH04506253A | 1992-10-29 | |||
JP2005300490A | 2005-10-27 | |||
JP2003092413A | 2003-03-28 |
Foreign References:
US4467656A | 1984-08-28 |
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