Title:
センサ装置
Document Type and Number:
Japanese Patent JP4467402
Kind Code:
B2
Inventors:
Shunji Nakamura
Atsushi Mimura
Shintaro Sato
Yuji Awano
Atsushi Mimura
Shintaro Sato
Yuji Awano
Application Number:
JP2004308065A
Publication Date:
May 26, 2010
Filing Date:
October 22, 2004
Export Citation:
Assignee:
富士通株式会社
International Classes:
G01D5/16; G01D5/14; G01D5/24; G01D5/241; G01F1/28; G01L1/14; G01L1/20; G01L9/02; G01L9/12; G01P5/04; G01P15/12; G01P15/125; G01P15/18
Domestic Patent References:
| JP200570038A | ||||
| JP2004184414A | ||||
| JP2003247830A | ||||
| JP2003227808A | ||||
| JP2001153738A |
Attorney, Agent or Firm:
Takayoshi Kokubun