Title:
センサ装置
Document Type and Number:
Japanese Patent JP4582056
Kind Code:
B2
Inventors:
Ichiji Kondo
Sakai Mineichi
Ryuichiro Abe
Sakai Mineichi
Ryuichiro Abe
Application Number:
JP2006162368A
Publication Date:
November 17, 2010
Filing Date:
June 12, 2006
Export Citation:
Assignee:
株式会社デンソー
International Classes:
H01L21/60; G01C19/56; G01C19/5769; G01P15/08; H01L29/84
Domestic Patent References:
| JP2001227902A | ||||
| JP2003234363A | ||||
| JP11067830A | ||||
| JP2003046096A | ||||
| JP2004311951A |
Attorney, Agent or Firm:
Yoji Ito
Takahiro Miura
Fumihiro Mizuno
Takahiro Miura
Fumihiro Mizuno