Title:
センサ装置
Document Type and Number:
Japanese Patent JP6667351
Kind Code:
B2
Abstract:
A sensor device includes: a sensor portion having a movable thin film and a detection element configured to output a signal corresponding to displacement of the movable thin film; a frame portion disposed to surround an outside of the sensor portion; a circuit board including a circuit configured to process the signal output from the detection element; and a lid portion which is attached onto the frame portion and has a through-hole, in which a functional film having higher hydrophobicity than a surface of the lid portion is provided on at least an inner surface of the through-hole in the lid portion.
Inventors:
Eiji Umezu
Application Number:
JP2016078141A
Publication Date:
March 18, 2020
Filing Date:
April 08, 2016
Export Citation:
Assignee:
Alps Alpine Co., Ltd.
International Classes:
G01L19/06; G01L9/00; H01L29/84
Domestic Patent References:
| JP2009512202A | ||||
| JP2011005986A | ||||
| JP3214691A | ||||
| JP2000243977A | ||||
| JP2009115607A | ||||
| JP2003302300A | ||||
| JP7218362A | ||||
| JP2008136195A | ||||
| JP2013093637A | ||||
| JP2007081706A | ||||
| JP2011188330A |
Foreign References:
| US20090067659 | ||||
| WO2009090851A1 | ||||
| US20140061892 |
Attorney, Agent or Firm:
Katsuyuki Okubo
野▲崎▼ 照夫
Masahiro Matsushita
野▲崎▼ 照夫
Masahiro Matsushita