Title:
センサ素子および角速度センサ
Document Type and Number:
Japanese Patent JP7076546
Kind Code:
B2
Abstract:
In a piezoelectric body of a sensor element, two first arms extend alongside each other from a base part to a +y side. Two second arms extend alongside each other from the base part to a -y side. A holding part extends between the two second arms from the base part to the -y side and extends out beyond front ends of the two second arms to the -y side. A mounting part on which a plurality of element terminals are located is connected to an end part on the -y side. The holding part includes a main portion and a connection portion. Where the length in an x-direction is the width, the main portion extends from a position between the front ends of the two second arms to a side where the base part is located, while maintaining a width not less than a width of a portion located between the front ends of the two second arms. The connection portion which is connected to the main portion and the base part and is broader in width than the main portion.
Inventors:
Munetaka Soejima
Application Number:
JP2020525621A
Publication Date:
May 27, 2022
Filing Date:
June 12, 2019
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
G01C19/5607; H01L41/107; H01L41/187
Domestic Patent References:
| JP1054725A | ||||
| JP2015102331A | ||||
| JP1172333A |
Attorney, Agent or Firm:
Yasuhiro Iijima
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