センサ素子及びその製造方法

Title:

センサ素子及びその製造方法

Document Type and Number:

Japanese Patent JP6873879

Kind Code:

B2

Abstract:

To provide a sensor element that can increase the detection accuracy and a method for manufacturing the sensor element.SOLUTION: A sensor element 1 includes a substrate 10, a sensitive film 30 on the substrate 10, and a protective layer 20 on the substrate 10. The protective layer 20 has a through-hole surrounding the sensitive film 30. The sensitive film 30 is in contact with the protective layer 20 in at least a part of the through-hole.SELECTED DRAWING: Figure 2

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Inventors:

Kobayashi Kyohei
Ryo Ueno
Hiroki Okada

Application Number:

JP2017186579A

Publication Date:

May 19, 2021

Filing Date:

September 27, 2017

Export Citation:

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Assignee:

Kyocera Corporation

International Classes:

G01N5/02; G01N19/00

Domestic Patent References:

JP2013015401A
JP2007132762A

Foreign References:

US20160011158
CN202614628U

Attorney, Agent or Firm:

Kenji Sugimura
Mitsutsugu Sugimura
Masahiro Ota
Yuro Yoshizawa

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