Title:
SENSOR ELEMENT
Document Type and Number:
Japanese Patent JP2016156623
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To equalize the distribution of membrane temperatures due to heating of a heater and improve the performance of gas detection.SOLUTION: The sensor element comprises a substrate having a cavity part, a first insulation layer formed so as to cover the cavity part, a heater formed on the first insulation layer corresponding to the position of the cavity part, a second insulation layer formed so as to cover the heater, and a detection part formed on the second insulation layer corresponding to the position of the cavity part. The heater has a first wiring part and a second wiring part, the first wiring part having a loop shape in the middle of the cavity part, the second wiring part consisting of a pair, connected to the first wiring part, and having a turn on the outside of the loop shape, as well as having a point symmetrical shape to the center of the loop shape, connected to each of an input terminal and an output terminal formed on the substrate, the detection part being approximately equal in size to the formed area of the heater.SELECTED DRAWING: Figure 1A
Inventors:
MATSUO YUTAKA
FUKUDA JUNYA
FUKUDA JUNYA
Application Number:
JP2015032659A
Publication Date:
September 01, 2016
Filing Date:
February 23, 2015
Export Citation:
Assignee:
TDK CORP
International Classes:
G01N27/18
Domestic Patent References:
| JP2011232295A | 2011-11-17 | |||
| JPH08315965A | 1996-11-29 | |||
| JP2011153996A | 2011-08-11 | |||
| JPS60123025A | 1985-07-01 | |||
| JP2009507217A | 2009-02-19 | |||
| JP2002131257A | 2002-05-09 | |||
| JP2002329566A | 2002-11-15 |
Foreign References:
| US20150016083A1 | 2015-01-15 | |||
| US20050135743A1 | 2005-06-23 | |||
| US20120056112A1 | 2012-03-08 |
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