Title:
SENSOR AND MEASURING DEVICE FOR DETECTING CHANGE IN TEMPERATURE GRADIENT
Document Type and Number:
Japanese Patent JP2002090228
Kind Code:
A
Abstract:
To provide a sensor and device capable of easily capturing changes and micro-changes in a temperature gradient.
The sensor is comprised of a membrane capacitor of a structure in which a membrane 12 of a ferroelectric BaTiO3 of a thickness of 30 ML (approximately 120 ) grown through the use of an MBE method is provided on a lower electrode 10 comprised of an SrTiO3 substrate doped with Nb of a thickness of 0.5 mm and in which a Pd upper electrode 14 is provided by deposition on the membrane 12. The polarization reversal of the membrane capacitor generated by the change of the temperature gradient is converted into a physical quantity i.e., a change in capacitance and measured by an LCR meter.
Inventors:
YONEDA YASUHIRO
Application Number:
JP2000283169A
Publication Date:
March 27, 2002
Filing Date:
September 19, 2000
Export Citation:
Assignee:
JAPAN ATOMIC ENERGY RES INST
International Classes:
G01K7/34; (IPC1-7): G01K7/34
Domestic Patent References:
JPH04188602A | 1992-07-07 | |||
JPH10332481A | 1998-12-18 | |||
JPH10227702A | 1998-08-25 | |||
JPH04348502A | 1992-12-03 | |||
JPH11273906A | 1999-10-08 | |||
JPS6054724B2 | 1985-12-02 | |||
JPH11233305A | 1999-08-27 |
Foreign References:
WO1998020316A1 | 1998-05-14 |
Attorney, Agent or Firm:
Kazuo Shamoto (5 outside)