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Title:
SENSOR AND MEASURING DEVICE EQUIPPED WITH SAME
Document Type and Number:
Japanese Patent JP2007093548
Kind Code:
A
Abstract:

To provide a sensor capable of performing high-accuracy measurement even if the sensor is dipped into a solution and a solution using an organic solvent, and to provide a device using the sensor.

The sensor comprises a piezoelectric plate, an electrode provided inside both the surfaces of the piezoelectric plate, and a terminal withdrawn from the electrode to the outside of the piezoelectric plate. One electrode in both the electrodes provided in the piezoelectric plate is covered with a coating member via a space. The coating member has other terminals for connection to a terminal, provided in the piezoelectric plate. The terminals, provided in the piezoelectric plate and that provided in the coating member, are fixed by a conductive adhesive with one of epoxy resin, polyimide resin, and phenol resin as main agents.


Inventors:
AZUMA MICHIRU
TANAKA TAKASHI
Application Number:
JP2005286825A
Publication Date:
April 12, 2007
Filing Date:
September 30, 2005
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
G01N5/02
Domestic Patent References:
JPH09145583A1997-06-06
JP2000258324A2000-09-22
Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida