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Title:
SENSOR AND MEASURING INSTRUMENT EQUIPPED WITH IT
Document Type and Number:
Japanese Patent JP2007101225
Kind Code:
A
Abstract:

To provide a sensor capable of performing measurement of high precision even if immersed in an aqueous solution or a solution using an organic solvent, and a measuring instrument using it.

The sensor is equipped with a piezoelectric plate and the electrodes provided inside both sides thereof. One of both electrodes provided to the piezoelectric plate is covered with a cover member formed into a cup shape so as to surround the edge surface of the piezoelectric plate through a space and the gap between the edge surface of the outer periphery of the piezoelectric plate and the inner peripheral surface of the cover member is sealed with a sealant. The turn-round amount of the sealant bonded to the surface on the space side of the piezoelectric plate is set to a range of 10% with respect to the maximum outer diameter of the piezoelectric plate from the edge surface of the outer periphery of the piezoelectric plate toward the inside direction thereof.


Inventors:
AZUMA MICHIRU
TANAKA TAKASHI
Application Number:
JP2005288151A
Publication Date:
April 19, 2007
Filing Date:
September 30, 2005
Export Citation:
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Assignee:
ULVAC CORP
International Classes:
G01N5/02; H01L41/08; H01L41/18
Domestic Patent References:
JPH09145583A1997-06-06
JP2005156289A2005-06-16
JP2000258324A2000-09-22
Attorney, Agent or Firm:
Yoshihiro Shimizu
Shinichi Abe
Yuji Tsujida