To properly control an attenuation amount to a sensor element of an outside acceleration, in response to change of the outside acceleration in the angular velocity sensor system, attached with the sensor element detecting an angular speed in a package.
In the angular velocity sensor system S1 provided with the package 100, and the sensor element 200 detecting an angular velocity attached to the package 100, the sensor element 200 is attached to the package 100, in a state with it being supported by a viscous control fluid 300, such as ER fluid and MR fluid, capable of controlling the viscosity, detecting acceleration applied on the sensor element 200, and controlling the voltage applied on a control electrode 110 on the basis of the detected acceleration.
Takahiro Miura
Fumihiro Mizuno
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