Title:
Sensor unit
Document Type and Number:
Japanese Patent JP5906688
Kind Code:
B2
Inventors:
Juri Kato
Takao Miyazawa
Takao Miyazawa
Application Number:
JP2011254704A
Publication Date:
April 20, 2016
Filing Date:
November 22, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01N17/04; G01N17/00; G01N27/00; G01N33/20; G01N33/38
Domestic Patent References:
| JP11153568A | ||||
| JP2005078473A |
Attorney, Agent or Firm:
Masahiko Ueyanagi
Osamu Suzawa
Osamu Suzawa
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